← Back to Browse
Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies

by Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka

Subjects

Microelectromechanical systems Silicon Electronic apparatus and appliances, design and construction Materials Electric properties Micro-Electrical-Mechanical Systems Microsystèmes électromécaniques Matériaux TECHNOLOGY & ENGINEERING Mechanical
Read on Open Library More by Markku Tilli

Related Books

Practical MEMS

Practical MEMS

Ville Kaajakari

20091 ed.
MEMS and Microsystems

MEMS and Microsystems

Tai-Ran Hsu

20018 ed.
Fundamentals of bioMEMS and medical microdevices

Fundamentals of bioMEMS and medical microdevices

Steven Saliterman

20052 ed.
Mechatronics

Mechatronics

Clarence W. de Silva

200410 ed.
Introduction to microsystem design

Introduction to microsystem design

Werner Karl Schomburg

20117 ed.
Mechatronics

Mechatronics

W. Bolton

20154 ed.
Electromechanical systems, electric machines, and applied mechatronics

Electromechanical systems, electric machines, and applied mechatronics

Sergey Edward Lyshevski

20005 ed.
Introduction to bioMEMS

Introduction to bioMEMS

Albert Folch

20126 ed.