← Back to Browse

Fabrication of silicon microprobes for optical near-field applications

by Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

Subjects

Micromachining Silicon Near-field microscopy Microprobe analysis Micro-usinage Analyse par microsonde Microscopie en champ proche Silicium TECHNOLOGY & ENGINEERING Optics

Read on Open Library More by Phan Ngoc Minh

Related Books